发明名称 |
Coordinated X-Y stage apparatus |
摘要 |
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.
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申请公布号 |
US6016607(A) |
申请公布日期 |
2000.01.25 |
申请号 |
US19990301500 |
申请日期 |
1999.04.28 |
申请人 |
SANDIA CORPORATION |
发明人 |
MORIMOTO, ALAN K.;KOZLOWSKI, DAVID M.;CHARLES, STEVEN T.;SPALDING, JAMES A. |
分类号 |
B25J3/00;B25J7/00;G05G11/00;G09B23/32;(IPC1-7):G09B23/32 |
主分类号 |
B25J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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