| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for preventing a processing gas beforehand from leaking to the outside part of a processing chamber, in which a substrate is housed and the pressure is reduced at introducing processing gas to the processing chamber. SOLUTION: The inside part of a processing chamber 32 in which a substrate W is housed is depressurized by an aspirator 22, and when the pressure of the inside part reaches a prescribed pressure, an electromagnetic switching valve 28 is closed. Before a processing gas is introduced into the processing chamber and the substrate is processed, the state is maintained in just for prescribed time period, and after a pressure gauge 30 confirms that the pressure of the inside part of the processing chamber has not changed within the prescribed time, the processing gas is introduced through a gas inlet pipeline 24 into the processing chamber. |
