SUBSTRATE RETAINING METHOD AND DEVICE AND EXPOSURE DEVICE WITH SUBSTRATE RETAINING DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent the particles of a resist from being generated even if a device is not exchanged and to retain substrates with a plurality of sizes corresponding to diversified substrate dimensions by positioning the edge of the substrates in a space formed by a plurality of projecting substrate supporting parts for retaining the substrates. SOLUTION: A plurality of projecting substrate supporting parts that are formed on nearly a flush plane and are aligned in a matrix are formed on a retaining surface 7 of a substrate retaining device. Then, eight recessed spaces Sa-Sh running in a crosswise direction in a groove shape and six groove-shaped recessed spaces S1-S6 running in a vertical direction are formed on the retention surface 7 by adjacent ones among a plurality of substrate supporting parts 2a1-2i7. Then, the edge part of a glass plate P is located at the recessed spaces Sa-Sh for sucking and retaining the glass plate P, thus retaining substrates with a plurality of sizes corresponding to diversified substrate dimensions by preventing the particles of a resist from being generated even if the device is not exchanged.