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发明名称
DETECTING TARGET OF PHOTO OVERLAY OF SEMICONDUCTOR DEVICE AND ITS FORMING METHOD
摘要
申请公布号
KR100234709(B1)
申请公布日期
1999.12.15
申请号
KR19960071298
申请日期
1996.12.24
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, SANG-PYO;BAN, KANG-HYEON
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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