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发明名称
INDUCTIVELY COUPLED PLASMA GENERATING SYSTEM USING GRID TYPE GAS INJECTING
摘要
申请公布号
KR100231345(B1)
申请公布日期
1999.11.15
申请号
KR19960003329
申请日期
1996.02.12
申请人
SOHN, MYOUNG HO;CHANG, HONG YOUNG
发明人
CHANG, HONG YOUNG;SOHN, MYOUNG HO;SEO, SANG-HOON
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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