| 摘要 |
PROBLEM TO BE SOLVED: To enable highly accurate temperature measurement by securing a temperature detecting part in which a temperature sensing element is formed on a substrate to the end face of a heat transferring member, connecting it to an output terminal, and molding the half parts of the temperature detecting part, the heat transferring member, and the output terminal. SOLUTION: An insulating layer, a thin-film temperature sensing element, and an insulating layer are sequentially laminated on a substrate to form a chip-shaped temperature detecting part 2. The upper end face of a heat transferring member 3 is secured to the temperature detection part 2 via a cement so as to be opposed to the surface of the temperature detecting part 2 on the side of the thin-film temperature sensing element 8. The temperature detecting part 2 is connected to an output terminal 4 by a bonding wire 13, and the upper half parts of the temperature detecting part 2 and the heat transferring member 3 and the lower half part of the output terminal 4 are coated with a coating member 5. Therefore, water does not seep into the temperature detecting part 2 to destroy its detecting circuit, or dust and solid particles do not adhere to the surface to degrade temperature characteristics. By this, it becomes possible to measure temperature with high accuracy at a local section. |
