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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH11297674(A)
申请公布日期
1999.10.29
申请号
JP19980106159
申请日期
1998.04.16
申请人
NEC CORP
发明人
KODAMA SHUICHI
分类号
H01L21/302;H01L21/3065;H01L21/311;H01L21/60;H01L21/768;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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