发明名称 Method for fabricating organic thin film
摘要 A method is provided that produces a good, strong organic monomolecular film having its atoms arranged in a three-dimensionally ordered manner by cleaving a III-V group compound semiconductor substrate in film formation molecules or in a solution containing them, in order to cause selective chemisorption which forms a monomolecular film and then deposits another layer of organic molecule film. In this method, the III-V group compound semiconductor substrate is cleaved in a solution containing SH groups dissolved into a solvent in order to form a self-assembled monolayer and is then placed in another solution, where metallic ions are adsorbed to the surface of the film or where the functional groups are converted by chemical treatment. The substrate is then immersed in a solution containing organic molecules that are selectively chemisorbed to the functional groups. This process is sequentially repeated to form good, strong multilayers having a three-dimensionally ordered arrangement while also controlling film thickness.
申请公布号 US5970381(A) 申请公布日期 1999.10.19
申请号 US19970924697 申请日期 1997.09.05
申请人 NATIONAL INSTITUTE FOR ADVANCED INTERDISCIPLINARY RESEARCH;SHARP KK;MOTOROLA INC 发明人 OHNO, HIROTAKA;NAGAHARA, LARRY A.;TOKUMOTO, HIROSHI
分类号 C30B33/00;B05D1/18;H01L21/20;H01L51/05;H01L51/40;(IPC1-7):H01L21/265 主分类号 C30B33/00
代理机构 代理人
主权项
地址