| 摘要 |
Micromechanical surface structures (34, 42, 44) are produced by alternately applying masks (22', 28) and layers (20, 24, 26) and then simultaneously etching the layers (20, 24, 26). A component production process comprises defining a micromechanical surface structure (34, 42, 44) by applying a mask (22') on a substrate layer (20), covering the mask with one or more further layers (24, 26), applying another mask (28) and then simultaneously structuring the layers (20, 24, 26) by surface etching (32).
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