FILM FORMING SPEED RECOVERING METHOD,申请号JP19970361030-传众专利搜索

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发明名称	FILM FORMING SPEED RECOVERING METHOD
摘要
申请公布号	JPH11195646(A)	申请公布日期	1999.07.21
申请号	JP19970361030	申请日期	1997.12.26
申请人	KOKUSAI ELECTRIC CO LTD	发明人	FUNAKI KATSUNORI
分类号	C23C16/50;H01L21/205;H01L21/31;(IPC1-7):H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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