发明名称 Process and apparatus for producing a single crystal
摘要 A semiconductor single crystal is pulled from a melt in a side heated crucible while an annular melt region around the crystal is additionally heated by an annular heater above the melt. An Independent claim is also included for equipment for carrying out the above process, in which an annular heater surrounds the crystal and is located above the melt for radiant heating of an annular region of the melt around the crystal. Preferred Features: The annular heater is a reflector, a resistance heater or an induction heater.
申请公布号 EP0926270(A1) 申请公布日期 1999.06.30
申请号 EP19980123048 申请日期 1998.12.08
申请人 WACKER SILTRONIC 发明人 VON AMMON, WILFRIED, DR.;TOMZIG, ERICH, DR.;VIRBULIS, JANIS, DR.
分类号 C30B15/14;H01L21/208 主分类号 C30B15/14
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