| 摘要 |
PROBLEM TO BE SOLVED: To surely grasp a large thin-type substrate, and to transfer the substrate so that it will not be damaged by its deflection. SOLUTION: A transferring robot M is constituted of a body part 2, a hand linear movement part 3, and a hand part 5. The hand part 5 is connected to two links 32 and 32 that are constituted at the hand linear movement part 3 and are provided in parallel. The hand linear movement part 3 includes the link 32, a movable block, an arm, and a groove-shaped cam for moving the hand part 5 linearly. The hand part 5 and the hand linear movement part 3 is made turnable by a motor, pulleys 9 and 11, and a belt 12 around a rotary shaft 8 that is arranged and fixed at the shaft-supporting part of the hand linear movement part 3. Then, the hand linear movement part 3 is actuated, the hand part 5 is moved for picking up a substrate W which is accommodated horizontally in a cassette C, and the substrate W is sucked and grasped by the hand part 5. Then, when the hand part 5 is moved linearly outside the cassette C, the rotary shaft 8 is turned by the motor, and the substrate W is converted into vertical direction before being transferred to a specific position. |
