| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a compact and lightweight XY stage that can move a mobile table at high speed. SOLUTION: In an XY stage, a mobile table 3 is supported to the surface of a base 4 via an air bearing. The XY stage has voice coil motors 1 and 2 for moving the mobile table 3 in X and Y directions, respectively. A link mechanism is mounted at the end part of the mobile table 3, where the mechanism is constituted of first links 5a and 5b, a connection member 16, and second links 15a and 15b. The mobile table 3 is retained by the link mechanism, so that the surface of the mobile table 3 can be moved in parallel in a plane being in parallel with the surface of the base 4. The mobile table 3 moves in parallel in a direction being in parallel with the surface of the base 4 by the driving of the voice coil motors 1 and 2 and the movement of the link mechanism.</p> |
