发明名称 BOARD PROCESSOR
摘要 PROBLEM TO BE SOLVED: To provide a board processor capable of reduction of the area of an occupied floor, the improvement of reliability, and the cost reduction. SOLUTION: A device body 1 is placed on floor material 200. An underfloor cabinet 100 is attached right below the floor material 200 under the device body 1. The underfloor cabinet 100 is constituted of member having permeability. A part of the constituent unit of a fluid facility, an exhaust facility, an intake facility, an electric facility, etc., is accommodated in the underfloor cabinet 100. The floor material 200 on the underfloor cabinet 100 is provided with a hole 201, and a conduit 101 to connect the underfloor cabinet 100 with the device body 1 is provided within the hole 201. A pipe and wiring to connect the constituent unit accommodated in the underfloor cabinet 100 with the device body 1 are inserted in the conduit 101.
申请公布号 JPH11150057(A) 申请公布日期 1999.06.02
申请号 JP19970317981 申请日期 1997.11.19
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 KOUGAKI KOUICHI;MORIOKA KAZUO;MIZUNO HIROKI
分类号 G03F7/16;B05C11/08;B05D1/40;G03F7/30;H01L21/027;(IPC1-7):H01L21/027 主分类号 G03F7/16
代理机构 代理人
主权项
地址