发明名称 Method for production of a three-dimensional circuit arrangement
摘要 PCT No. PCT/DE95/00857 Sec. 371 Date Dec. 20, 1996 Sec. 102(e) Date Dec. 20, 1996 PCT Filed Jul. 3, 1995 PCT Pub. No. WO96/01497 PCT Pub. Date Jan. 18, 1996In order to produce a three-dimensional circuit arrangement, two substrates (21, 26) which have components in the region of their boundary surfaces (22, 27) which touch one another are stacked one on top of the other. The substrates (21, 26) are firmly connected to one another via these boundary surfaces (22, 27). One of the substrates (21) can subsequently be thinned from the rear side (212) and can be provided with rear-side contacts (213), the other substrate (26) acting as a stabilizing supporting plate.
申请公布号 US5902118(A) 申请公布日期 1999.05.11
申请号 US19960765088 申请日期 1996.12.20
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HUEBNER, HOLGER
分类号 H01L25/18;H01L25/065;H01L25/07;H01L27/00;(IPC1-7):H01L21/44 主分类号 H01L25/18
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