| 摘要 |
A lower-level conductor layer is formed in a surface of, on or over a semiconductor substrate. An interlayer insulator film is formed on the lower-level conductor layer. An upper-level conductor layer such as an interconnection layer of the semiconductor device is formed on the interlayer insulator film. A conductor plug is formed in a contact hole of the interlayer insulator film. The lower-level conductor layer and the upper-level conductor layer are electrically connected with each other through the conductor plug. A top part of the conductor plug protrudes from the interlayer insulator film. The upper-level conductor layer is contacted with a top face and a side face of the top part of the conductor plug. Both the contact resistance between the conductor contact and the upper-level conductor layer and the resistance of the upper-level conductor layer itself can be reduced without using a special equipment and a special process. |
