MANUFACTURE OF INFRARED RADIATION DETECTOR, ESPECIALLY OF INFRARED DETECTING BOLOMETER

摘要

PROBLEM TO BE SOLVED: To obtain an infrared detecting bolometer whose insulating property is improve by a method, wherein a sacrificial layer is formed on a substrate so as to be patterned, a polycrystalline silicon germanium active layer and an infrared absorber are laminated on the sacrificial layer, and then the sacrificial layer is removed. SOLUTION: In a bolometer, a sacrificial layer 12 is patterned and formed on a substrate 11, and an active layer 13 which is composed of polycrystalline silicon germanium is laminated on the sacrificial layer 12. The sacrificial layer 12 can be defined as a layer which is used only to realize the purpose of the thermal insulation of the bolometer. In fact, the bolometer must be thermally insulated. Otherwise, its temperature cannot be controlled any longer due to an incident radiation. In this manner, the structure of the bolometer is formed on the upper-part face of the sacrificial layer 12, it is connected to the substrate 11 through a support part, and the thermal conductivity of the support part fulfills an important role for the insulation of an apparatus.