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摘要
申请公布号
JP2856030(B2)
申请公布日期
1999.02.10
申请号
JP19930158253
申请日期
1993.06.29
申请人
SHINETSU HANDOTAI KK
发明人
MITANI KYOSHI;KATAYAMA MASAYASU
分类号
H01L21/02;B81C1/00;H01L21/20;H01L21/324;H01L27/12;(IPC1-7):H01L21/02
主分类号
H01L21/02
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代理人
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