| 摘要 |
PCT No. PCT/GB94/01696 Sec. 371 Date Apr. 4, 1996 Sec. 102(e) Date Apr. 4, 1996 PCT Filed Aug. 2, 1994 PCT Pub. No. WO95/04063 PCT Pub. Date Feb. 9, 1995Novel organometallic complexes of aluminium, gallium and indium are disclosed, having improved stability and volatility for use in CVD processes. These are donor ligand complexes of the formula MR2L where M is the metal, R is an alkyl group and L is a ligand containing an amidine (R'N+E,ovs . . . +EE C(R')+E,ovs . . . +EE NR') group, where R' is H, alkyl etc.
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