| 摘要 |
PROBLEM TO BE SOLVED: To prevent cracks during mechanical polishing or ion polishing without change in a fabrication procedure, reinforce a thin filmed part, and observe the part by employing a thin-film specimen reinforce material filled with a resin containing inorganic particles in a plurality of opening holes inside a circular ring part. SOLUTION: For a reinforce material 5 of a thin film specimen, a resin 3 containing an inorganic particle 4 is filled in a mesh part 2 provided inside a circular ring part 1. This reinforce material 5 is adhered to a specimen with its proper thickness prior to mechanical polishing in the case of fabricating a thin film specimen for transmission electron microscope. A particle size of the inorganic particle 4 containing the resin 3 is preferably 0.5 to 10μm, below a thickness of the reinforce material 5. The inorganic particle 4 restrains generation of cracks of the specimen during mechanical polishing, therefore, quarts, glass, or silicon crystal or the like having its rigidity equal to that of a glass base to which the specimen is adhered is preferred.
|
