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发明名称
摘要
申请公布号	JP2801096(B2)	申请公布日期	1998.09.21
申请号	JP19910294203	申请日期	1991.11.11
申请人		发明人
分类号	H01J27/18;H01J37/08;H01L21/302;H01L21/3065;H05H1/22;H05H1/46;H05H7/08;(IPC1-7):H01J27/18;H01L21/306	主分类号	H01J27/18
代理机构		代理人
主权项
地址

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