PROBE CARD,申请号JP19970027479-传众专利搜索

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发明名称	PROBE CARD
摘要
申请公布号	JPH10221373(A)	申请公布日期	1998.08.21
申请号	JP19970027479	申请日期	1997.02.12
申请人	HITACHI LTD	发明人	MATSUZAWA HITOSHI
分类号	G01R1/073;H01L21/66;(IPC1-7):G01R1/073	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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