| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method by which a nonconnected spin valve film having a large inverted magnetic field and/or a high rate of resistance change can be manufactured. SOLUTION: After an Fe/Co laminated layer which becomes a free layer 2, a Cu thin film which becomes a nonmagnetic layer 3, and a Co thin film which becomes a fixed layer 4 are successively formed in this order on a substrate 1 composed of glass, etc., the laminated film is heat-treated within the temperature range of 200-250 deg.C in the air. When the heat treatment is performed, the inverted magnetic field of the laminated film is improved without lowering the rate of resistance change of the laminated film. In addition, the laminated film is heat-treated at a temperature of <=270 deg.C in a vacuum so as to improve the rate of resistance change. When the laminated film is heat-treated twice in the air and vacuum (in disorder) in the above-mentioned way, a large inverted magnetic field and a high rate of resistance change can be obtained.</p> |
