| 摘要 |
PROBLEM TO BE SOLVED: To provide an independent linear dual-blade robot assembly which can efficiently transport a semiconductor wafer. SOLUTION: A robot assembly 10 includes a rotary base 11 disposed within a chamber, a linear track 12 mounted on an upper face of the rotary base 11, and powered platens 13a and 13b which is slidably mounted on the linear track 12 as movable along a longitudinal axis of the track 12. The platens 13a and 13b are magnetically driven and have end effectors 14a and 14b extended from their front ends respectively. The end effectors 14a and 14b of the both platens 13a and 13b are positioned desirably in the same horizontal plane. The linear track 12 may be a single track which carries the both powered platens 12a and 12b or may be made up of two linear track parts having the single powered platens 12a and 12b respectively. The two track parts are pivotably mounted on the rotary base. |
