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发明名称
CHEMICAL GAS PHASE GROWING METHOD
摘要
申请公布号
JPH1045490(A)
申请公布日期
1998.02.17
申请号
JP19960200357
申请日期
1996.07.30
申请人
NISSAN MOTOR CO LTD
发明人
TANIMOTO SATOSHI
分类号
C30B25/02;C30B35/00;H01L21/205;H01L21/31;H01L21/316;(IPC1-7):C30B25/02
主分类号
C30B25/02
代理机构
代理人
主权项
地址
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