Fabrication method of polarization-controlled surface-emitting laser diode using tilted-cavity

摘要

A fabrication method of a surface-emitting laser diode which permits easy control of polarization in a desired direction is disclosed. The laser emits light from an emitting surface having a sidewall inclined with respect to a normal to the emitting surface. An ion beam is provided for etching the inclined sidewall of the laser and a substrate is positioned having a face which is formed into the emitting surface in the ion beam to cause the ion beam to intercept a sidewall of the substrate to form the inclined sidewall. The face is tilted about either one of a [110] or a [1+E,ovs 1+EE 0] direction. An angle is formed ranging between 5 DEG and 45 DEG measured between the inclined sidewall and the [001] direction.