| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately detect a position of a reticule and a plate, etc., without affected by a vibration, in a position detecting device for a semiconductor manufacturing device, etc. SOLUTION: Supporting leg's tips 15a and 16a are connected to supporting leg's roots 15b and 16b with magnets 31 and 32. Though a reticule position detection system 49 is vibrated by a vibration applied to a device, the vibration is absorbed by the magnets 31 and 32 attached to the supporting leg's tips 15a and 16a. Since the vibration of the reticule position detection system 49 is also absorbed, a position of reticule R is accurately detected without being affected by the vibration.</p> |
