Semiconductor acceleration sensor

摘要

A highly reliable semiconductor acceleration sensor in which the amplification of the oscillation of the cantilever beam does not become large and break the beam. The semiconductor acceleration sensor has a beam support provided on a circuit substrate and a flexible acceleration detection beam deflecting according with the applied acceleration. An adhesive is disposed between the beam support and the acceleration detection beam. The semiconductor acceleration sensor has a sensor element for converting the deflection of the acceleration detection beam into an electrical signal. The natural oscillation frequency of the support section, formed by the adhesive and a root section of the beam which is fixed to the adhesive and the resonance frequency of the acceleration detection beam section extending from the root section do not overlap.