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发明名称
摘要
申请公布号	JP2669523(B2)	申请公布日期	1997.10.29
申请号	JP19870135676	申请日期	1987.05.29
申请人		发明人
分类号	H01L21/302;C23F4/00;H01L21/3065;(IPC1-7):H01L21/306	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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