| 摘要 |
PROBLEM TO BE SOLVED: To solve problems about friction and wear of a magnetic head with a magnetic recording medium by forming a protective film having high wear resistance and chemical stability and large adhesion strength to the head base body on the counter surface of the head facing a magnetic recording medium. SOLUTION: A thin film of hydrogenated amorphous silicon oxide [a-SiOx:H] is formed on the counter surface of the head facing a magnetic recording medium. The hydrogenated amorphous silicon oxide thin film decreases the frictional coefft. when the head touches a magnetic recording medium to produce friction and the thin film improves the wear resistance of the magnetic head. The hydrogenated amorphous silicon oxide itself is chemically stable and does not react with oxygen in air nor with DLC which is a protective film of a recording medium. Further, the adhesive strength of the film to the head base body is very strong. In this case, x in the hydrogenated amorphous silicon oxide is preferably controlled to 1.0 to 1.8. |
