| 摘要 |
PROBLEM TO BE SOLVED: To provide an article processor capable of promptly performing return works accompanying handling miss without changing temperature environments in a chamber. SOLUTION: Maintenance gloves 8 are provided in an outer wall portion of a chamber 2 as return works accompanying handling miss. This can intercept the atmosphere in the chamber 2 and the open air while a hand can be inserted into the chamber 2. Further, in order to fetch out an article 10 from the chamber 2, an article fetch-out unit 9 is fitted on to an outer wall portion of the chamber 2 within a range that a hand inserted into the maintenance gloves 8 reaches, and it is possible to fetch out the article 10 by opening and closing lids 12, 13 provided at both the ends without releasing the chamber 2. |
