| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve the reliability in vacuum of a vacuum device for a semiconductor device by providing a vacuum variable measuring and a control system which measures a plurality of vacuum variables connected to a vacuum chamber, compares the measured variables with their set values, and controls the vacuum chamber based on the compared results. SOLUTION: A vacuum variable measuring and control system 37 measures three vacuum variables, namely, the pressure, time until a set pressure is reached, and temperature, compares the measured variables with their set values, and controls a vacuum chamber 31 based on the compared results. Namely, the pressured in the chamber 31 is adjusted by means of a controller 39. When the measured variables are larger than the set values, the chamber 31 is actuated and, when the variables are smaller than the set values, the chamber 31 is stopped and, at the same time, an alarm device is actuated. Then the system 37 controls the vacuum variables by using a microcomputer and the controller 39 adjusts the pressure in the chamber 31.</p> |
