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发明名称
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPH0964094(A)
申请公布日期
1997.03.07
申请号
JP19950212154
申请日期
1995.08.21
申请人
TOSHIBA CORP
发明人
KUSAKARI TERUO
分类号
H01L21/60;H01L21/603;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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