发明名称 SEALABLE, TRANSPORTABLE CONTAINER HAVING A BREATHER ASSEMBLY
摘要 A transportable, sealable container (18), for example a SMIF pod, including a box (20) and a box door (32). The box (20) has a first sealing surface (91) and the box door (32) has a second sealing surface (93). The two sealing surfaces (91, 93) form a seal when the box door (32) is moved in a sealing position with respect to the box (20). A latch mechanism (118) is provided in the box door (32) for holding the box door in the sealing position. The container further includes a breather assembly having an aperture (110), with a filter (74), that allows gas to flow between the interior of the container (18) and an environment external to the container. A valve (112), which is latched by the latch (118), opens and closes the aperture (110). When the latch (118) unlocks the box door (32), the valve (112) opens the aperture (110). When the door (32) is locked, the valve (112) closes the aperture (110).
申请公布号 WO9703001(A1) 申请公布日期 1997.01.30
申请号 WO1996US11296 申请日期 1996.07.03
申请人 ASYST TECHNOLOGIES, INC. 发明人 BONORA, ANTHONY, C.;ROSENQUIST, FREDERICK, T.;JAIN, SUDHIR;DAVIS, MARK, R.
分类号 B65D6/40;H01L21/673;(IPC1-7):B65D85/30 主分类号 B65D6/40
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