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发明名称
DEVICE AND METHOD FOR DETECTING DEPOSITED FILM
摘要
申请公布号
JPH0914951(A)
申请公布日期
1997.01.17
申请号
JP19950163213
申请日期
1995.06.29
申请人
SONY CORP
发明人
YAMADA HIROSHI
分类号
G01B11/16;G01B21/20;H01L21/203;H01L21/205;H01L21/66;(IPC1-7):G01B21/20
主分类号
G01B11/16
代理机构
代理人
主权项
地址
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