Matching or adaptor network tuning method e.g. for HF plasma generation

摘要

A method of automatically tuning a matching or adaptor network (2) which is arranged between an electric supply or power source and a load, involves inserting an autotuning control which functions as a fuzzy system. The load is a plasma path the impedance (3) of which is measured and the capacitance of the matching or adaptor network capacitors (4-6( is calculated and corresp. adjusted, after measurement of the plasma impedance.