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发明名称
DEVICE AND METHOD FOR PLASMA TREATMENT
摘要
申请公布号
JPH08250488(A)
申请公布日期
1996.09.27
申请号
JP19950328147
申请日期
1995.11.22
申请人
SEIKO EPSON CORP
发明人
YASHIMA KOJI
分类号
H05H1/46;C23F4/00;H01J37/32;H01L21/302;H01L21/3065;H01L21/31;H01L21/316;H01L21/318;H01L21/324;(IPC1-7):H01L21/31;H01L21/306
主分类号
H05H1/46
代理机构
代理人
主权项
地址
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