METHOD OF FORMING THIN METALLIC FILM OF SEMICONDUCTOR ELEMENT AND PRODUCTION OF GAS SENSOR,申请号JP19950151991-传众专利搜索

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发明名称	METHOD OF FORMING THIN METALLIC FILM OF SEMICONDUCTOR ELEMENT AND PRODUCTION OF GAS SENSOR
摘要
申请公布号	JPH08188869(A)	申请公布日期	1996.07.23
申请号	JP19950151991	申请日期	1995.06.19
申请人	L G DENSHI KK	发明人	SHIN GENU;KEN TETSUKAN;KOU KEIKI;RI KEISHIYOU;BOKU HIYONSHIYU;IN DOUGEN;KIN NARIYASU
分类号	G01N27/12;C23C14/14;H01L21/203;H01L21/28;H01L21/283;H01L21/285;H01L21/441;(IPC1-7):C23C14/14	主分类号	G01N27/12
代理机构		代理人
主权项
地址

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