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发明名称
摘要
申请公布号
JP2513420(B2)
申请公布日期
1996.07.03
申请号
JP19930195619
申请日期
1993.07.14
申请人
NIPPON ELECTRIC CO
发明人
HAMATAKE NOBUHISA
分类号
H01L21/8238;H01L21/265;H01L21/266;H01L21/76;H01L27/092;(IPC1-7):H01L21/823
主分类号
H01L21/8238
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