| 摘要 |
PROBLEM TO BE SOLVED: To prevent a burst phenomenon under a high vacuum by balancing the pressures by a simple device and an operation in a mechanism in which a rotary shaft is hermetically sealed using a magnetic fluid seal. SOLUTION: In a magnetic fluid sealing type rotation introducing machine provided with a mechanism for sealing a rotary shaft 2 connected to a vacuum camber A, a connection passage 3 connected to the vacuum chamber A is provided in an intermediate chamber B between a seal step adjacent to the vacuum chamber A a next seal step to balance the pressure in both the chambers. Further, an opening/closing valve 4 is provided in the course of the connection passage 3. By a opening or closing operation of the opening/closing valve 4, object pressures can be selected freely.
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