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发明名称
PRODUCTION OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0845993(A)
申请公布日期
1996.02.16
申请号
JP19950204224
申请日期
1995.08.10
申请人
HITACHI LTD
发明人
SAKAI TOSHIHIKO
分类号
H01L21/603;H01L21/60;(IPC1-7):H01L21/603
主分类号
H01L21/603
代理机构
代理人
主权项
地址
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