METHOD AND DEVICE FOR ETCHING,申请号JP19940165153-传众专利搜索

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发明名称	METHOD AND DEVICE FOR ETCHING
摘要
申请公布号	JPH0831802(A)	申请公布日期	1996.02.02
申请号	JP19940165153	申请日期	1994.07.18
申请人	HITACHI LTD	发明人	TAGO KAZUATSU;KAZUMI HIDEYUKI;TOKUNAGA TAKAFUMI
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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