METHOD FOR DIVIDING BLOCK PATTERN FOR BLOCK EXPOSURE,申请号JP19940118919-传众专利搜索

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发明名称	METHOD FOR DIVIDING BLOCK PATTERN FOR BLOCK EXPOSURE
摘要
申请公布号	JPH07326560(A)	申请公布日期	1995.12.12
申请号	JP19940118919	申请日期	1994.05.31
申请人	FUJITSU LTD	发明人	MIYAJIMA MASAAKI
分类号	H01L21/027;(IPC1-7):H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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