| 摘要 |
PURPOSE:To provide an inspection method whereby reliability can be enhanced for the inspection of a planar display device, CONSTITUTION:To avoid light from a light source 59 from reaching a CCD camera 56 prior to inspection of an LCD(liquid-crystal display), a douser 60 is placed on a sliding table 58 to block a translucent hole, and the CCD camera 56 takes pictures under these conditions. The CCD camera 56 shows a black detected level for normal picture elements received, while it shows a white detected level for defective picture elements received. The imaging results from the CCD camera 56 are detected by an image processing board 52 to check the detected level of each picture element received, to specify the defective picture elements received. To inspect the LCD, the imaging results of the defective picture elements received are corrected using the imaging results of the ambient normal picture elements received, to prevent the reliability of LCD inspection from being degraded by the defective picture elements received. |
