| 摘要 |
PURPOSE:To perform processing along the edge of a substrate accurately even if there is a deviation in the edge position of a substrate. CONSTITUTION:The processing along the edge of a square-shaped substrate is executed by shifting four pieces of substrate edge cleaning blocks 10a-10d, each of which has an upper solvent nozzle 52, a lower solvent nozzle 53, and a gas nozzle 54, severally along the four sides of the square-shaped substrate. The substrate edge cleaning blocks 10a-10d have two position sensors 55 and 56 each which detect the positions of the edges of the square-shaped board, and also, they can be shifted in the direction (X direction) where they come close to or separate from the edges of the square-shaped substrate. Based on the detection signals by the position sensors 55 and 56, the direction in X direction of the substrate edge cleaning blocks 10a-10d are controlled to always follow the edges of the square-shaped substrate. Hereby, the processing is performed while following the edges of the substrate, high accuracy is not required for the mount position of the substrate. |
