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发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH07230960(A)
申请公布日期
1995.08.29
申请号
JP19940183265
申请日期
1994.08.04
申请人
SHARP CORP
发明人
SENDA JUN;OKAMOTO HIROSHI;SANNOMIYA HITOSHI;NOMOTO KATSUHIKO;YAMAMOTO YOSHIHIRO
分类号
H01L21/205;C23C16/44;C23C16/509;H01L31/04;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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