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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH07226400(A)
申请公布日期
1995.08.22
申请号
JP19930147567
申请日期
1993.06.18
申请人
KAWASAKI STEEL CORP
发明人
OGAWA KAZUYOSHI
分类号
H01L21/60;H01L21/321;(IPC1-7):H01L21/321
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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