| 摘要 |
PURPOSE:To raise the working ratio of a device by organically coupling respective configuration devices to each other and optimizing operations of the entire device. CONSTITUTION:This embodiment comprises a SOR ring for generating synchrotron radiating beams; SOR ring controlling means 2 for controlling it; a plurality of aligners arranged radially surrounding the SOR ring; a plurality of aligner controlling means 4a to 4e for controlling these respectively; and communicating means 5 for connecting between the SOR ring controlling means 2 and a plurality aligner controlling means 4a to 4e to transfer data. |
