| 摘要 |
<p>PURPOSE:To stably fix a large glass substrate by making the entire surface positive contact with a placement stand. CONSTITUTION:A plurality of square suction grooves 21a-21d arranged with a proper spacing are provided symmetrically with respect to the center point O of a large glass substrate 11 to be placed are provided on the surface of a placement stand 2. The glass substrate 11 which is placed at the placement stand 2 and whose surrounding is curved upward is sucked by air successively with a proper time lag deltat in the order of the suction grooves 21b, 21c, and 21d away from the suction groove 21a closer to the center point O and the entire surface of the glass substrate 11 is adhered to the placement stand 2, thus stably fixing the large glass substrate 11 on the placement stand 2 and hence preventing position deviation from occurring, at the same time focusing the focus of an exposure device to the entire surface, and accurately performing the projection exposure of the pattern of a mask plate 52.</p> |
