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发明名称
SUSCEPTOR
摘要
申请公布号
JPH07161648(A)
申请公布日期
1995.06.23
申请号
JP19930340344
申请日期
1993.12.09
申请人
TOSHIBA CERAMICS CO LTD
发明人
MIYAZAKI AKIRA;HAYASHI TATEO;SHIN TAIRA;OKAWA MASAYUKI;AONUMA SHINICHIRO
分类号
C23C14/50;H01L21/205;H01L21/31;(IPC1-7):H01L21/205
主分类号
C23C14/50
代理机构
代理人
主权项
地址
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